As a recognized expert in vibration isolation technology, Meiriz Seiki Co.,Ltd is committed to providing optimal solution to customers' vibration problems.

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Honeycomb table air suspension vibration isolatorAYA series

The AYA Series is Meiritz's top-of the line series which features improved isolation performance and various useful functions. The AYA Series is the crystallization of advanced technology developed entirely by Meiritz. In particular, through improvement of holizontal direction vibration isolation performance, the AYA Series is able to respond to the optical experimentation needs including interferometers and holography equipment which are sensitive to minute vibrations in all directions.

  • Passive
  • Honeycomb

Business Fields

  • For Optical & Laser
AYA series
  • Surface table

Features

Parallel Swing Mechanism

The AYA Series is equipped with Meiritz's original parallel swing mechanism which can be likened to a swing which can swing forward and backward an well as to the right and left, and moreover, can do so simultaneously. The result is the realization of the natural frequency in the horizontal direction being reduced to 0.5 Hz, less than 1/3 that of our previous models.

New Mechanisms for Emphasis on Ease of Use

The AYA Series is equipped with a newtype of damper which utilizes the new material Alpha-GEL Damping performance, which is able to promptly absorb any vibrations which cause the surface table to fluctuate, has been improved even more without any loss of vibration isolation performance thereby leading to increased ease of use. Alpha-GEL is the registered trademark of GELTEC CO.,LTD.

Specifications

  • AYA-Type K4
  • AYA-Type K5
AYA-Type K4
  • M6 mounting holes ,either on 50mm grid or 25mm grid (to be specified by the user).
  • Through hole and special tapped hole working available. Can join Honeycomb tables . (optional)
SPECIFICATIONS
MODEL1007K41209K41510K41512K41809K41812K4
Natural frequencyVertical:1.1Hz Horizontal:0.5Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping method Vertical:Air damping using variable orifices
Horizontal:Special damping using the α-GEL
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)1000×7501200×9001500×10001500×12001800×9001800×1200
Table thickness(mm)100200
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)220280340380365430
Air supply0.35~0.70MPa
MODEL2010K42012K42015K42210K42212K42215K4
Natural frequencyVertical:1.1Hz Horizontal:0.5Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping method Vertical:Air damping using variable orifices
Horizontal:Special damping using the α-GEL
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)2000×10002000×12002000×15002200×10002200×12002200×1500
Table thickness(mm)200
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)405455550435490590
Air supply0.35~0.70MPa
MODEL2412K42415K43012K43015K43612K4
Natural frequencyVertical:1.1Hz Horizontal:0.5HzVertical:1.2Hz Horizontal:0.8Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping method Vertical:Air damping using variable orifices
Horizontal:Special damping using the α-GEL
Air damping using orifices
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)2400×12002400×15003000x12003000×15003600x1200
Table thickness(mm)200300
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)530635735900855
Air supply0.35~0.70MPa
MODEL3615K44012K44015K4
Natural frequencyVertical:1.2Hz Horizontal:0.8Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping methodAir damping using orifices
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)3600x15004000×12004000×1500
Table thickness(mm)300
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)10409351145
Air supply0.35~0.70MPa
AYA-Type K5
  • M6 mouting holes ,either on 50mm grid or 25mm grid (to be specified by the user).
  • Suitable for class 100 clean room uses. (each tapped hole is airtight and an automatic leveler is equipped with exhaust air drain line).
SPECIFICATIONS
MODEL1007K51209K51510K51512K51809K51812K5
Natural frequencyVertical:1.1Hz Horizontal:0.5Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping method Vertical:Air damping using variable orifices
Horizontal:Special damping using the α-GEL
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)1000×7501200×9001500×10001500×12001800×9001800×1200
Table thickness(mm)100200
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)230310380425405485
Air supply0.35~0.70MPa
MODEL2010K52012K52015K52210K52212K52215K5
Natural frequencyVertical:1.1Hz Horizontal:0.5Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping method Vertical:Air damping using variable orifices
Horizontal:Special damping using the α-GEL
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)2000×10002000×12002000×15002200×10002200×12002200×1500
Table thickness(mm)200
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)460520630495560675
Air supply0.35~0.70MPa
MODEL2412K52415K53012K53015K5
Natural frequencyVertical:1.1Hz Horizontal:0.5HzVertical:1.2Hz Horizontal:0.8Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping method Vertical:Air damping using variable orifices
Horizontal:Special damping using the α-GEL
Air damping using orifices
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)2400×12002500×15003000x12003000×1500
Table thickness(mm)200300
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)605735785925
Air supply0.35~0.70MPa
MODEL3612K53615K54012K54015K5
Natural frequencyVertical:1.2Hz Horizontal:0.8Hz
Vibration isolation methodVertical:Diaphragm air spring Horizontal:Parallel swing mechanism
Damping methodAir damping using orifices
Leveling methodAutomatic levelers keep the surface table level automatically
Load weight(kg)300
Table dimensions(mm)3600x12003600x15004000×12004000×1500
Table thickness(mm)300
Table materialsSteel Honeycomb:Top plate SUS430 5t(4t)、Bottom plate SS400 4.5t
Machine height(mm)800
Machine weight(kg)915107510051180
Air supply0.35~0.70MPa

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