Pneumatic vibration isolation systemAP-MKC series
Low natural frequency unit type vibration isolator, can be used for equipment having moving mass
Low natural frequency unit type vibration isolator, can be used for equipment having moving mass
- Passive
Business Fields
- For Measurement
- For Semiconductor
- Unit type
Features
外観図
AP-MKC outline
Specifications
- 主な仕様
| Model | AP-230MKC | AP-270MKC | AP-330MKC |
|---|---|---|---|
| Natural frequency | vertical：1.5～2.0Hz / holizontal：1.0～1.5Hz | ||
|
Vibration Isolation method | Air suspension | ||
| Damping method | Dumping by Orifice | ||
| Leveling Method |
Automatic Leveling mecanical air valve (Positioning Tolerance: ±100μm） | ||
|
Dimensions （W×D×H mm） | 300×300×220 | 320x320x220 | 370×370×220 |
| Mass（kg/unit） | 46 | 56 | 72 |
| Payload（kg/4units） | 6200 | 8600 | 13000 |
| AxB(mm) | 270x270 | 290x290 | 340x340 |
| ΦC(mm) | 13 | 13 | 13 |
| Suppiled Air Pressure (MPa) |
0.5MPa (Air source：Compressed air by an air compressor, relieving a factory's piping of its air,or liquid nitrogen gas） | ||
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